Tutorial Date: March 25, Wed., 13:30-16:30, Time: 3 hours

Presenter: Professor Michael S.-C. Lu (盧向成),NTHU 

Title: MEMS Sensors

Place: Delta Bldg. 104R

Registration: http://dtc.web.nthu.edu.tw/files/87-1008-1489.php

Deadline:  March 20, Friday

Abstract:

Introduced in the 1980’s, MEMS (Microelectromechanical Systems) refers to the technology that makes small devices typically from a few to hundreds of micrometers in size. MEMS technology provides the benefits of small size, low weight, high performance, convenient mass production and low cost. Today MEMS sensors can be found in nearly every motor vehicle and smart phone. In cars, accelerometers cover applications ranging from occupant protection (firing of an airbag) to active suspension. Nowadays the 3-axis accelerometer, geomagnetic sensor and gyroscope can be integrated into a single package to provide sensing with nine degrees of freedom, enabling key applications in gaming, navigation and location-based services. Due to continuous research efforts and innovations, more MEMS sensors find their applications in biotechnology and biomedicine. For examples, MEMS pressure sensors have been used to detect blood pressure and intraocular pressure. MEMS pumps with flow sensing capability can be mounted on a disposable skin patch to provide timely, continuous insulin injection. Lab-on-a-chip systems are developed to allow point-of-care detection of small molecules, cells, glucose, DNA and protein. In addition to the aforementioned examples, this talk will provide a comprehensive coverage of MEMS sensor development in the last few decades.

Biography:

Prof. Shiang-cheng Lu (盧向成) received the B.S. and M.S. degrees in mechanical engineering from National Tsing Hua University and the Ph.D. degree in electrical engineering from Carnegie Mellon University. Since 2002 he has been with the Department of Electrical Engineering, National Tsing Hua University, where he is currently a Professor. He has authored chapters titled “Position Control of MEMS” and “CMOS MEMS Biosensors” in the books titled “Feedback Control of MEMS to Atoms” and “Encyclopedia of Nanotechnology”. He has also published about 80 research papers in the field of CMOS MEMS sensors and actuators, and served as a TPC member of the IEEE Asian Solid-State Circuits Conference and IEEE Sensors Conference.